Two-Dimensional Fast Fourier Transform Analysis of Surface Microstructures of Thin Aluminium Films Prepared by Radio-Frequency (RF) Magnetron Sputtering

Fredrick M. Mwema, Esther T. Akinlabi, Oluseyi P. Oladijo

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Citations (Scopus)

Abstract

The purpose of this article is to illustrate the use of two-dimensional fast Fourier transform (2D-FFT) algorithm to describe the properties of aluminium thin films. To do so, the microstructures of thin Al films deposited on stainless steel substrates though radio-frequency (RF) magnetron sputtering are analysed using two-dimensional fast Fourier transform (2D-FFT) algorithm. Field emission scanning electron microscope (FESEM) and atomic force microscope (AFM) images obtained on the surfaces of the films are taken through different image analysis processes. The power spectra are described in terms of spatial frequencies, wavelengths and light intensities in the reciprocal space for both SEM and AFM images. The results of power spectra obtained from FESEM and AFM micrographs are compared for two different cases-films deposited at 200 and 300 W at the same substrate temperature (100 °C). We observe that the 2D-FFT analysis of both SEM and AFM methods can describe (in more details) the distribution of surface structures in thin aluminium films.

Original languageEnglish
Title of host publicationAdvances in Material Sciences and Engineering, ICMMPE 2018
EditorsMokhtar Awang, Seyed Sattar Emamian, Farazila Yusof
PublisherSpringer Science and Business Media Deutschland GmbH
Pages239-249
Number of pages11
ISBN (Print)9789811382963
DOIs
Publication statusPublished - 2020
Event4th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2018 - Melaka, Malaysia
Duration: 14 Nov 201815 Nov 2018

Publication series

NameLecture Notes in Mechanical Engineering
ISSN (Print)2195-4356
ISSN (Electronic)2195-4364

Conference

Conference4th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2018
Country/TerritoryMalaysia
CityMelaka
Period14/11/1815/11/18

Keywords

  • Aluminium thin films
  • Atomic force microscopy (AFM)
  • Fast Fourier transform (FFT)
  • Field emission electron microscopy (FESEM)
  • Image analysis
  • Sputtering

ASJC Scopus subject areas

  • Automotive Engineering
  • Aerospace Engineering
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

Fingerprint

Dive into the research topics of 'Two-Dimensional Fast Fourier Transform Analysis of Surface Microstructures of Thin Aluminium Films Prepared by Radio-Frequency (RF) Magnetron Sputtering'. Together they form a unique fingerprint.

Cite this