The mechanistic effect over the substrate in a square type atomic layer deposition reactor
- Rigardt Alfred Maarten Coetzee
- , Tien Chien Jen
- , Muaaz Bhamjee
- , Junling Lu
- University of Johannesburg
- University of Science and Technology of China
Research output: Contribution to journal › Article › peer-review
11
Citations
(Scopus)