Fingerprint
Dive into the research topics of 'The investigation of the exposure time effects with pressure in the atomic layer deposition process over micro-trench surface'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
The investigation of the exposure time effects with pressure in the atomic layer deposition process over micro-trench surface
Olufunsho Oladipo Olotu, Rigardt Alfred Maarten Coetzee, Peter Apata Olubambi, Tien Chien Jen
Research output: Contribution to journal › Article › peer-review