The distribution of hydrogen in polycrystalline CVD diamond

R. D. Maclear; I. E. Butler; S. H. Connell; B. P. Doyle; I. Z. Machi; D. B. Rebuli; J. P.F. Sellschop; E. Sideras-Haddad

doi:10.1016/s0925-9635(99)00061-8

The distribution of hydrogen in polycrystalline CVD diamond

R. D. Maclear, I. E. Butler, S. H. Connell, B. P. Doyle, I. Z. Machi, D. B. Rebuli, J. P.F. Sellschop, E. Sideras-Haddad

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

The location of the hydrogen prevalent in chemical vapor deposition (CVD) diamond has long been of much interest, not least because of the information it reveals about the H-driven growth mechanism. We have used micro-scanning elastic recoil detection analysis to map the hydrogen distribution in three dimensions in polycrystalline CVD diamond. The interface between two CVD layers, one grown with, and one grown without oxygen in the growth mixture has been studied for its hydrogen concentration. An upper limit on bulk hydrogen concentration has been determined. The possibility of hydrogen trapping in the bulk is also discussed.

Original language	English
Pages (from-to)	1615-1619
Number of pages	5
Journal	Diamond and Related Materials
Volume	8
Issue number	8-9
DOIs	https://doi.org/10.1016/s0925-9635(99)00061-8
Publication status	Published - Aug 1999
Externally published	Yes

Keywords

CVD
Diamond
Elastic recoil detection
Hydrogen

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
General Chemistry
Mechanical Engineering
Materials Chemistry
Electrical and Electronic Engineering

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10.1016/s0925-9635(99)00061-8

Cite this

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title = "The distribution of hydrogen in polycrystalline CVD diamond",

abstract = "The location of the hydrogen prevalent in chemical vapor deposition (CVD) diamond has long been of much interest, not least because of the information it reveals about the H-driven growth mechanism. We have used micro-scanning elastic recoil detection analysis to map the hydrogen distribution in three dimensions in polycrystalline CVD diamond. The interface between two CVD layers, one grown with, and one grown without oxygen in the growth mixture has been studied for its hydrogen concentration. An upper limit on bulk hydrogen concentration has been determined. The possibility of hydrogen trapping in the bulk is also discussed.",

keywords = "CVD, Diamond, Elastic recoil detection, Hydrogen",

author = "Maclear, {R. D.} and Butler, {I. E.} and Connell, {S. H.} and Doyle, {B. P.} and Machi, {I. Z.} and Rebuli, {D. B.} and Sellschop, {J. P.F.} and E. Sideras-Haddad",

year = "1999",

month = aug,

doi = "10.1016/s0925-9635(99)00061-8",

language = "English",

volume = "8",

pages = "1615--1619",

journal = "Diamond and Related Materials",

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TY - JOUR

T1 - The distribution of hydrogen in polycrystalline CVD diamond

AU - Maclear, R. D.

AU - Butler, I. E.

AU - Connell, S. H.

AU - Doyle, B. P.

AU - Machi, I. Z.

AU - Rebuli, D. B.

AU - Sellschop, J. P.F.

AU - Sideras-Haddad, E.

PY - 1999/8

Y1 - 1999/8

N2 - The location of the hydrogen prevalent in chemical vapor deposition (CVD) diamond has long been of much interest, not least because of the information it reveals about the H-driven growth mechanism. We have used micro-scanning elastic recoil detection analysis to map the hydrogen distribution in three dimensions in polycrystalline CVD diamond. The interface between two CVD layers, one grown with, and one grown without oxygen in the growth mixture has been studied for its hydrogen concentration. An upper limit on bulk hydrogen concentration has been determined. The possibility of hydrogen trapping in the bulk is also discussed.

AB - The location of the hydrogen prevalent in chemical vapor deposition (CVD) diamond has long been of much interest, not least because of the information it reveals about the H-driven growth mechanism. We have used micro-scanning elastic recoil detection analysis to map the hydrogen distribution in three dimensions in polycrystalline CVD diamond. The interface between two CVD layers, one grown with, and one grown without oxygen in the growth mixture has been studied for its hydrogen concentration. An upper limit on bulk hydrogen concentration has been determined. The possibility of hydrogen trapping in the bulk is also discussed.

KW - CVD

KW - Diamond

KW - Elastic recoil detection

KW - Hydrogen

UR - http://www.scopus.com/inward/record.url?scp=0032594263&partnerID=8YFLogxK

U2 - 10.1016/s0925-9635(99)00061-8

DO - 10.1016/s0925-9635(99)00061-8

M3 - Article

AN - SCOPUS:0032594263

SN - 0925-9635

VL - 8

SP - 1615

EP - 1619

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 8-9

ER -

The distribution of hydrogen in polycrystalline CVD diamond

Abstract

Keywords

ASJC Scopus subject areas

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