Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering

Olayinka Oluwatosin Abegunde; Esther Titilayo Akinlabi; Oluseyi Philip Oladijo

doi:10.1007/978-981-15-4745-4_51

Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering

Olayinka Oluwatosin Abegunde, Esther Titilayo Akinlabi, Oluseyi Philip Oladijo

Mechanical Engineering Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this research study, the effect of temperature and radio frequency (RF) power on the surface morphology and structural properties of titanium carbide (TiC) thin film was studied. TiC thin film was deposited on the surface of commercially pure titanium (CpTi) alloys to enhance its surface properties. During the deposition process, the sputtering temperature and RF power were varied while other sputtering parameters were kept constant. Field emission scanning electron microscope was used to analyze the surface profiling of the film, and atomic force microscope was used to study the surface roughness. Raman spectroscopy was used to determine the film composition, and grazing incidence X-ray diffractometer was used to analyze the phase composition. Nanoindentation was carried out to understand the hardness and Young’s modulus properties of the coating. The results reveal the dependency of the thin film properties on the independent process parameters.

Original language	English
Title of host publication	Trends in Manufacturing and Engineering Management - Select Proceedings of ICMechD 2019
Editors	S. Vijayan, Nachiappan Subramanian, K. Sankaranarayanasamy
Publisher	Springer
Pages	583-590
Number of pages	8
ISBN (Print)	9789811547447
DOIs	https://doi.org/10.1007/978-981-15-4745-4_51
Publication status	Published - 2021
Event	2nd International Conference on Mechanical Engineering Design, ICMechD 2019 - Chennai, India Duration: 25 Apr 2019 → 26 Apr 2019

Publication series

Name	Lecture Notes in Mechanical Engineering
ISSN (Print)	2195-4356
ISSN (Electronic)	2195-4364

Conference

Conference	2nd International Conference on Mechanical Engineering Design, ICMechD 2019
Country/Territory	India
City	Chennai
Period	25/04/19 → 26/04/19

Keywords

RF power
Temperature
Thin film
TiC

ASJC Scopus subject areas

Automotive Engineering
Aerospace Engineering
Mechanical Engineering
Fluid Flow and Transfer Processes

Access to Document

10.1007/978-981-15-4745-4_51

Cite this

Abegunde, O. O., Akinlabi, E. T., & Oladijo, O. P. (2021). Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering. In S. Vijayan, N. Subramanian, & K. Sankaranarayanasamy (Eds.), Trends in Manufacturing and Engineering Management - Select Proceedings of ICMechD 2019 (pp. 583-590). (Lecture Notes in Mechanical Engineering). Springer. https://doi.org/10.1007/978-981-15-4745-4_51

Abegunde, Olayinka Oluwatosin ; Akinlabi, Esther Titilayo ; Oladijo, Oluseyi Philip. / Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering. Trends in Manufacturing and Engineering Management - Select Proceedings of ICMechD 2019. editor / S. Vijayan ; Nachiappan Subramanian ; K. Sankaranarayanasamy. Springer, 2021. pp. 583-590 (Lecture Notes in Mechanical Engineering).

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title = "Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering",

abstract = "In this research study, the effect of temperature and radio frequency (RF) power on the surface morphology and structural properties of titanium carbide (TiC) thin film was studied. TiC thin film was deposited on the surface of commercially pure titanium (CpTi) alloys to enhance its surface properties. During the deposition process, the sputtering temperature and RF power were varied while other sputtering parameters were kept constant. Field emission scanning electron microscope was used to analyze the surface profiling of the film, and atomic force microscope was used to study the surface roughness. Raman spectroscopy was used to determine the film composition, and grazing incidence X-ray diffractometer was used to analyze the phase composition. Nanoindentation was carried out to understand the hardness and Young{\textquoteright}s modulus properties of the coating. The results reveal the dependency of the thin film properties on the independent process parameters.",

keywords = "RF power, Temperature, Thin film, TiC",

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Abegunde, OO, Akinlabi, ET & Oladijo, OP 2021, Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering. in S Vijayan, N Subramanian & K Sankaranarayanasamy (eds), Trends in Manufacturing and Engineering Management - Select Proceedings of ICMechD 2019. Lecture Notes in Mechanical Engineering, Springer, pp. 583-590, 2nd International Conference on Mechanical Engineering Design, ICMechD 2019, Chennai, India, 25/04/19. https://doi.org/10.1007/978-981-15-4745-4_51

Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering. / Abegunde, Olayinka Oluwatosin; Akinlabi, Esther Titilayo; Oladijo, Oluseyi Philip.
Trends in Manufacturing and Engineering Management - Select Proceedings of ICMechD 2019. ed. / S. Vijayan; Nachiappan Subramanian; K. Sankaranarayanasamy. Springer, 2021. p. 583-590 (Lecture Notes in Mechanical Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering

AU - Abegunde, Olayinka Oluwatosin

AU - Akinlabi, Esther Titilayo

AU - Oladijo, Oluseyi Philip

PY - 2021

Y1 - 2021

N2 - In this research study, the effect of temperature and radio frequency (RF) power on the surface morphology and structural properties of titanium carbide (TiC) thin film was studied. TiC thin film was deposited on the surface of commercially pure titanium (CpTi) alloys to enhance its surface properties. During the deposition process, the sputtering temperature and RF power were varied while other sputtering parameters were kept constant. Field emission scanning electron microscope was used to analyze the surface profiling of the film, and atomic force microscope was used to study the surface roughness. Raman spectroscopy was used to determine the film composition, and grazing incidence X-ray diffractometer was used to analyze the phase composition. Nanoindentation was carried out to understand the hardness and Young’s modulus properties of the coating. The results reveal the dependency of the thin film properties on the independent process parameters.

AB - In this research study, the effect of temperature and radio frequency (RF) power on the surface morphology and structural properties of titanium carbide (TiC) thin film was studied. TiC thin film was deposited on the surface of commercially pure titanium (CpTi) alloys to enhance its surface properties. During the deposition process, the sputtering temperature and RF power were varied while other sputtering parameters were kept constant. Field emission scanning electron microscope was used to analyze the surface profiling of the film, and atomic force microscope was used to study the surface roughness. Raman spectroscopy was used to determine the film composition, and grazing incidence X-ray diffractometer was used to analyze the phase composition. Nanoindentation was carried out to understand the hardness and Young’s modulus properties of the coating. The results reveal the dependency of the thin film properties on the independent process parameters.

KW - RF power

KW - Temperature

KW - Thin film

KW - TiC

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M3 - Conference contribution

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T3 - Lecture Notes in Mechanical Engineering

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BT - Trends in Manufacturing and Engineering Management - Select Proceedings of ICMechD 2019

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A2 - Subramanian, Nachiappan

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PB - Springer

T2 - 2nd International Conference on Mechanical Engineering Design, ICMechD 2019

Y2 - 25 April 2019 through 26 April 2019

ER -

Abegunde OO, Akinlabi ET, Oladijo OP. Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering. In Vijayan S, Subramanian N, Sankaranarayanasamy K, editors, Trends in Manufacturing and Engineering Management - Select Proceedings of ICMechD 2019. Springer. 2021. p. 583-590. (Lecture Notes in Mechanical Engineering). doi: 10.1007/978-981-15-4745-4_51

Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering

Abstract

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Keywords

ASJC Scopus subject areas

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