Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition
- Sridhar Sampath
- , Philipp Maydannik
- , Tatiana Ivanova
- , Tomáš Homola
- , Mika Sillanpää
- , Rameshbabu Nagumothu
- , Viswanathan Alagan
Research output: Contribution to journal › Article › peer-review
20
Citations
(Scopus)