Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition

Sridhar Sampath, Philipp Maydannik, Tatiana Ivanova, Tomáš Homola, Mika Sillanpää, Rameshbabu Nagumothu, Viswanathan Alagan

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition'. Together they form a unique fingerprint.

Material Science

Keyphrases