Reactor scale simulation of an atomic layer deposition process

Chemical Engineering

• Atomic Layer Deposition 100%
• Deposition Rate 100%
• Viscous Flow 50%

Keyphrases

• Stokes Transport 33%
• Reacting Flow 33%
• Viscous Flow Reactor 33%
• Gaseous Reactants 33%
• Surface Reaction Rate Constant 33%
• Gas-surface Reactions 33%
• Gas-phase Reactions 33%

Engineering

• Reacting Flow 33%
• Specie Transport Equation 33%
• Flow Reactor 33%