Skip to main navigation Skip to search Skip to main content

Precise control of precursor sticking coefficient on substrates with large aspect ratios in ALD

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Fingerprint

Dive into the research topics of 'Precise control of precursor sticking coefficient on substrates with large aspect ratios in ALD'. Together they form a unique fingerprint.
Sort by

Keyphrases

Chemistry

Chemical Engineering