Overview of thin film deposition techniques

Olayinka Oluwatosin Abegunde, Esther Titilayo Akinlabi, Oluseyi Philip Oladijo, Stephen Akinlabi, Albert Uchenna Ude

Research output: Contribution to journalReview articlepeer-review

180 Citations (Scopus)

Abstract

Surface properties of the material can affect the efficiency and behavior of the material when in service. Modifying and tuning these surface properties to meet the specific demand for better performance is feasible and has been vastly employed in a different aspect of life. This can be achieved by coating the surface via deposition of the thin film. This study provides a review of the existing literature of different deposition techniques used for surface modification and coating. The two major areas of interest discussed are physical and chemical vapor deposition techniques, and the area of applications of surface coating was briefly highlighted in this report.

Original languageEnglish
Pages (from-to)174-199
Number of pages26
JournalAIMS Materials Science
Volume6
Issue number2
DOIs
Publication statusPublished - 2019

Keywords

  • Chemical vapor deposition
  • Physical vapor deposition
  • Surface coating
  • Thin film

ASJC Scopus subject areas

  • General Materials Science

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