Modelling Considerations for Coupled Lines in CMOS Back-End-Of-Line at mm-Wave Frequencies

Johannes J.P. Venter, Tinus Stander

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We investigate the effect of passivation contouring, surface roughness, and sidewall tapering on the FEM modelling accuracy of mm-wave couplers in CMOS BEOL. Of three effects, sidewall tapering leads to the most significant improvement (0.37 dB) in predicting peak coupling magnitude at V-band. Ultimately, it is found that none of these measures substantially improve on modelling accuracy.

Original languageEnglish
Title of host publication2021 15th International Conference on Advanced Technologies, Systems and Services in Telecommunications, TELSIKS 2021 - Proceedings
EditorsBratislav D. Milovanovic, Nebojsa S. Doncov, Zoran Z. Stankovic, Biljana P. Stosic
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages99-102
Number of pages4
ISBN (Electronic)9781665444422
DOIs
Publication statusPublished - 2021
Externally publishedYes
Event15th International Conference on Advanced Technologies, Systems and Services in Telecommunications, TELSIKS 2021 - Virtual, Nis, Serbia
Duration: 20 Oct 202122 Oct 2021

Publication series

Name2021 15th International Conference on Advanced Technologies, Systems and Services in Telecommunications, TELSIKS 2021 - Proceedings

Conference

Conference15th International Conference on Advanced Technologies, Systems and Services in Telecommunications, TELSIKS 2021
Country/TerritorySerbia
CityVirtual, Nis
Period20/10/2122/10/21

Keywords

  • CMOS technology
  • Directional couplers
  • Finite element analysis
  • Numerical simulation

ASJC Scopus subject areas

  • Information Systems and Management
  • Computer Networks and Communications
  • Hardware and Architecture
  • Safety, Risk, Reliability and Quality
  • Instrumentation

Fingerprint

Dive into the research topics of 'Modelling Considerations for Coupled Lines in CMOS Back-End-Of-Line at mm-Wave Frequencies'. Together they form a unique fingerprint.

Cite this