Microwave amplification with nanomechanical resonators

Francesco Massel, Tero T. Heikkilä, Juha Matti Pirkkalainen, Sung Un Cho, Heini Saloniemi, Pertti J. Hakonen, Mika A. Sillanpää

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


There is strong interest at present in nanoelectromechanical systems (NEMS) in IC technology. On one hand, the interest arises from the need to have integrated oscillators to replace quartz devices and, on the other hand, from the wish to have tunable filters for cognitive radios in mobile communications. In addition, there are lots of opportunities in quantum information processing, where coherence properties are crucial, and where mechanical systems at low temperatures are notoriously suitable as their harmonic character and low loss can provide exceedingly long relaxation times.

Original languageEnglish
Title of host publication2013 IEEE International Solid-State Circuits Conference, ISSCC 2013 - Digest of Technical Papers
Number of pages2
Publication statusPublished - 2013
Externally publishedYes
Event2013 60th IEEE International Solid-State Circuits Conference, ISSCC 2013 - San Francisco, CA, United States
Duration: 17 Feb 201321 Feb 2013

Publication series

NameDigest of Technical Papers - IEEE International Solid-State Circuits Conference
ISSN (Print)0193-6530


Conference2013 60th IEEE International Solid-State Circuits Conference, ISSCC 2013
Country/TerritoryUnited States
CitySan Francisco, CA

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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