Micromorphology of sputtered aluminum thin films: A fractal analysis

Keyphrases

• Al Thin Film 33%
• Aluminium Structures 33%
• Aluminum Film 33%
• Aluminum Thin Film 100%
• Atomic Force Microscope 33%
• Elastic Modulus 33%
• Field Emission Scanning Electron Microscopy (FE-SEM) 33%
• Fractal Analysis 100%
• Fractal Dimension 33%
• Fractality 33%
• Globular 33%
• High Substrate Temperature 33%
• Interface Width 33%
• Low Substrate Temperature 33%
• Magnetron Sputtering Method 33%
• Maximum Depth 33%
• Mechanical Behavior 33%
• Mechanical Properties 33%
• Micromorphology 100%
• Microscope Method 33%
• Microstructure 33%
• Microstructure Behavior 33%
• Microstructure Properties 33%
• Monofractal 33%
• Nanoindentation 33%
• Nanoindentation Technique 33%
• Power Frequency 66%
• Radio Frequency Magnetron Sputtering 33%
• Substrate Temperature 100%
• Surface Analysis 33%
• Surface Microstructure 33%

Material Science

• Aluminum 100%
• Elastic Moduli 25%
• Film 100%
• Magnetron Sputtering 25%
• Mechanical Property 50%
• Nanoindentation 50%
• Scanning Electron Microscopy 25%
• Surface Analysis 25%
• Thin Films 100%