Microfabrication and nanotechnology in manufacturing system - An overview

O. M. Ikumapayi, E. T. Akinlabi, A. O.M. Adeoye, S. O. Fatoba

Research output: Contribution to journalConference articlepeer-review

44 Citations (Scopus)

Abstract

An insight into nanotechnology, microfabrication, and their relevance were explored in this review. A brief history of the emancipation of nanotechnology and their various applications were documented. Microfabrication and its relevance in automobiles and medicine are scripted. A brief overview of photolithography, soft lithography, film deposition, and etching is presented. The evolution of the integrated circuit system and microelectromechanical system (MEMS) are also documented.

Original languageEnglish
Pages (from-to)1154-1162
Number of pages9
JournalMaterials Today: Proceedings
Volume44
DOIs
Publication statusPublished - 2021
Event11th International Conference on Materials Processing and Characterization - Indore, India
Duration: 15 Dec 202017 Dec 2020

Keywords

  • Integrated Circuit system
  • Microelectromechanical system
  • Microfabrication
  • Nanotechnology
  • Photolithography

ASJC Scopus subject areas

  • General Materials Science

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