Microfabrication and nanotechnology in manufacturing system - An overview

O. M. Ikumapayi; E. T. Akinlabi; A. O.M. Adeoye; S. O. Fatoba

doi:10.1016/j.matpr.2020.11.233

Microfabrication and nanotechnology in manufacturing system - An overview

O. M. Ikumapayi, E. T. Akinlabi, A. O.M. Adeoye, S. O. Fatoba

Mechanical Engineering Science

Research output: Contribution to journal › Conference article › peer-review

49 Citations (Scopus)

Abstract

An insight into nanotechnology, microfabrication, and their relevance were explored in this review. A brief history of the emancipation of nanotechnology and their various applications were documented. Microfabrication and its relevance in automobiles and medicine are scripted. A brief overview of photolithography, soft lithography, film deposition, and etching is presented. The evolution of the integrated circuit system and microelectromechanical system (MEMS) are also documented.

Original language	English
Pages (from-to)	1154-1162
Number of pages	9
Journal	Materials Today: Proceedings
Volume	44
DOIs	https://doi.org/10.1016/j.matpr.2020.11.233
Publication status	Published - 2021
Event	11th International Conference on Materials Processing and Characterization - Indore, India Duration: 15 Dec 2020 → 17 Dec 2020

Keywords

Integrated Circuit system
Microelectromechanical system
Microfabrication
Nanotechnology
Photolithography

ASJC Scopus subject areas

General Materials Science

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.matpr.2020.11.233

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title = "Microfabrication and nanotechnology in manufacturing system - An overview",

abstract = "An insight into nanotechnology, microfabrication, and their relevance were explored in this review. A brief history of the emancipation of nanotechnology and their various applications were documented. Microfabrication and its relevance in automobiles and medicine are scripted. A brief overview of photolithography, soft lithography, film deposition, and etching is presented. The evolution of the integrated circuit system and microelectromechanical system (MEMS) are also documented.",

keywords = "Integrated Circuit system, Microelectromechanical system, Microfabrication, Nanotechnology, Photolithography",

author = "Ikumapayi, {O. M.} and Akinlabi, {E. T.} and Adeoye, {A. O.M.} and Fatoba, {S. O.}",

note = "Publisher Copyright: {\textcopyright} 2021 Elsevier Ltd. All rights reserved.; 11th International Conference on Materials Processing and Characterization ; Conference date: 15-12-2020 Through 17-12-2020",

year = "2021",

doi = "10.1016/j.matpr.2020.11.233",

language = "English",

volume = "44",

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journal = "Materials Today: Proceedings",

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AU - Ikumapayi, O. M.

AU - Akinlabi, E. T.

AU - Adeoye, A. O.M.

AU - Fatoba, S. O.

PY - 2021

Y1 - 2021

N2 - An insight into nanotechnology, microfabrication, and their relevance were explored in this review. A brief history of the emancipation of nanotechnology and their various applications were documented. Microfabrication and its relevance in automobiles and medicine are scripted. A brief overview of photolithography, soft lithography, film deposition, and etching is presented. The evolution of the integrated circuit system and microelectromechanical system (MEMS) are also documented.

AB - An insight into nanotechnology, microfabrication, and their relevance were explored in this review. A brief history of the emancipation of nanotechnology and their various applications were documented. Microfabrication and its relevance in automobiles and medicine are scripted. A brief overview of photolithography, soft lithography, film deposition, and etching is presented. The evolution of the integrated circuit system and microelectromechanical system (MEMS) are also documented.

KW - Integrated Circuit system

KW - Microelectromechanical system

KW - Microfabrication

KW - Nanotechnology

KW - Photolithography

UR - http://www.scopus.com/inward/record.url?scp=85105603522&partnerID=8YFLogxK

U2 - 10.1016/j.matpr.2020.11.233

DO - 10.1016/j.matpr.2020.11.233

M3 - Conference article

AN - SCOPUS:85105603522

SN - 2214-7853

VL - 44

SP - 1154

EP - 1162

JO - Materials Today: Proceedings

JF - Materials Today: Proceedings

T2 - 11th International Conference on Materials Processing and Characterization

Y2 - 15 December 2020 through 17 December 2020

ER -

Microfabrication and nanotechnology in manufacturing system - An overview

Abstract

Keywords

ASJC Scopus subject areas

UN SDGs

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