Investigating atomic layer deposition characteristics in multi-outlet viscous flow reactors through reactor scale simulations
- Mohammad Reza Shaeri
- , Tien Chien Jen
- , Chris Yingchun Yuan
- , Masud Behnia
- University of Wisconsin
- Advanced Cooling Technologies, Inc.
- University of Alaska Anchorage
- Macquarie University
Research output: Contribution to journal › Article › peer-review
24
Citations
(Scopus)