Influence of sputtering parameters on the structural and mechanical properties of TiC thin film coating

Engineering

• Thin Films 100%
• Microstructure 66%
• Radio Frequency 66%
• Ray Diffraction 33%
• Ray Photoelectron Spectroscopy 33%
• Defects 33%
• Atomic Force Microscope 33%
• Pure Titanium 33%
• Hardness Value 33%
• Young's Modulus 33%
• X-Ray Diffraction Analysis 33%
• Field Emission Scanning Electron Microscope 33%
• Coating Technique 33%
• Microstructural Evolution 33%
• Surface Morphology 33%
• Surface Topography 33%
• Structural Property 33%
• Magnetron 33%

Material Science

• Film 100%
• Titanium Carbide 100%
• Thin Film Coating 100%
• X-Ray Diffraction 40%
• Surface Morphology 20%
• Scanning Electron Microscopy 20%
• Structural Property 20%
• Young's Modulus 20%
• X-Ray Photoelectron Spectroscopy 20%
• Magnetron Sputtering 20%
• Surface Topography 20%
• Raman Spectroscopy 20%
• Titanium 20%
• Surface Property 20%
• Microstructural Evolution 20%
• Nanoindentation 20%
• Thin Films 20%

Keyphrases

• Carbide Thin Films 100%
• Magnetron Sputtering Coating 25%
• Preferential Growth 25%
• Sputtering Temperature 25%