@inproceedings{519de6467481491f85b1ab559481e3f8,
title = "Implementation of a 6 GHz MEMS switch",
abstract = "The design and simulation of a microelectromechanical systems (MEMS) switch at 6 GHz are presented in this paper. A MEMS shunt capacitive switch is implemented and simulated using the Keysight Technologies Advanced Design System. With the Momentum electromagnetic simulator, the scattering parameter plots for the up and down states of the MEMS switch are obtained to compare the switch characteristics.",
keywords = "Coplanar waveguide (CPW), MEMS switch, Membrane, Microelectromechanical systems (MEMS), S-parameters",
author = "Saurabh Chaturvedi and Mladen Bozanic and Saurabh Sinha",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 3rd IEEE International Symposium on Nanoelectronic and Information Systems, iNIS 2017 ; Conference date: 18-12-2017 Through 20-12-2017",
year = "2017",
month = jul,
day = "2",
doi = "10.1109/iNIS.2017.25",
language = "English",
series = "Proceedings - 2017 IEEE International Symposium on Nanoelectronic and Information Systems, iNIS 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "74--77",
booktitle = "Proceedings - 2017 IEEE International Symposium on Nanoelectronic and Information Systems, iNIS 2017",
address = "United States",
}