Abstract
Hydrogen and oxygen play a significant role in the growth of diamond chemical vapour deposition (CVD), and also influence its electrical, optical and structural properties. Using the microERDA technique, trapping and diffusion of hydrogen in a range of different types of natural and synthetic diamond have been investigated under different conditions such as high dose hydrogen implants after creation of vacancies and plasma loading of hydrogen. Recently, these have been extended to include natural p-type semiconducting diamond. Resonance RBS and forward scattering in channelling transmission mode with thin diamond single crystals have been used to determine the concentration and lattice site occupancy of surface oxygen.
Original language | English |
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Pages (from-to) | 419-425 |
Number of pages | 7 |
Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
Volume | 181 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - Jul 2001 |
Externally published | Yes |
Event | 7th International Conference on Nuclear Microprobe Technology (ICNMTA-2000) - Bordeaux, France Duration: 10 Sept 2000 → 15 Sept 2000 |
Keywords
- Defects
- Diamond
- Hydrogen
- Oxygen
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Instrumentation