Hydrogen and oxygen chemistry and dynamics in diamond studied by nuclear microscopic techniques

E. Sideras-Haddad, S. H. Connell, J. P.F. Sellschop, I. Z. Machi, D. Rebuli, R. D. Maclear, B. P. Doyle

Research output: Contribution to journalConference articlepeer-review

12 Citations (Scopus)

Abstract

Hydrogen and oxygen play a significant role in the growth of diamond chemical vapour deposition (CVD), and also influence its electrical, optical and structural properties. Using the microERDA technique, trapping and diffusion of hydrogen in a range of different types of natural and synthetic diamond have been investigated under different conditions such as high dose hydrogen implants after creation of vacancies and plasma loading of hydrogen. Recently, these have been extended to include natural p-type semiconducting diamond. Resonance RBS and forward scattering in channelling transmission mode with thin diamond single crystals have been used to determine the concentration and lattice site occupancy of surface oxygen.

Original languageEnglish
Pages (from-to)419-425
Number of pages7
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume181
Issue number1-4
DOIs
Publication statusPublished - Jul 2001
Externally publishedYes
Event7th International Conference on Nuclear Microprobe Technology (ICNMTA-2000) - Bordeaux, France
Duration: 10 Sept 200015 Sept 2000

Keywords

  • Defects
  • Diamond
  • Hydrogen
  • Oxygen

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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