Abstract
By inserting a SrZrO3 buffer layer between the film and the substrate, we demonstrate a significant reduction of the threading dislocation density with an associated improvement of the electron mobility in La:BaSnO3 films. A room temperature mobility of 140 cm2 V-1s-1 is achieved for 25-nm-thick films without any postgrowth treatment. The density of threading dislocations is only 4.9 × 109 cm-2 for buffered films prepared on (110) TbScO3 substrates by pulsed laser deposition.
Original language | English |
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Article number | 041119 |
Journal | APL Materials |
Volume | 7 |
Issue number | 4 |
DOIs | |
Publication status | Published - 1 Apr 2019 |
ASJC Scopus subject areas
- General Materials Science
- General Engineering