Fabrication of Nanostructures

T. Daniel Thangadurai; N. Manjubaashini; Sabu Thomas; Hanna J. Maria

doi:10.1007/978-3-030-26145-0_11

Fabrication of Nanostructures

T. Daniel Thangadurai
, N. Manjubaashini
, Sabu Thomas
, Hanna J. Maria

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

1 Citation (Scopus)

Abstract

This chapter explains the techniques that are available for fabricating nanostructures and also explain the substrates and wafers, modification of materials, lithography, film deposition, wet and dry etching, wafer bonding and packaging.

Original language	English
Title of host publication	Engineering Materials
Publisher	Springer Science and Business Media B.V.
Pages	129-147
Number of pages	19
DOIs	https://doi.org/10.1007/978-3-030-26145-0_11
Publication status	Published - 2020
Externally published	Yes

Publication series

Name	Engineering Materials
ISSN (Print)	1612-1317
ISSN (Electronic)	1868-1212

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1007/978-3-030-26145-0_11

Cite this

@inbook{cd5df8eccc5549b5ac5c978da01ba2d7,

title = "Fabrication of Nanostructures",

abstract = "This chapter explains the techniques that are available for fabricating nanostructures and also explain the substrates and wafers, modification of materials, lithography, film deposition, wet and dry etching, wafer bonding and packaging.",

author = "Thangadurai, \{T. Daniel\} and N. Manjubaashini and Sabu Thomas and Maria, \{Hanna J.\}",

note = "Publisher Copyright: {\textcopyright} 2020, Springer Nature Switzerland AG.",

year = "2020",

doi = "10.1007/978-3-030-26145-0\_11",

language = "English",

series = "Engineering Materials",

publisher = "Springer Science and Business Media B.V.",

pages = "129--147",

booktitle = "Engineering Materials",

address = "Germany",

}

TY - CHAP

T1 - Fabrication of Nanostructures

AU - Thangadurai, T. Daniel

AU - Manjubaashini, N.

AU - Thomas, Sabu

AU - Maria, Hanna J.

PY - 2020

Y1 - 2020

N2 - This chapter explains the techniques that are available for fabricating nanostructures and also explain the substrates and wafers, modification of materials, lithography, film deposition, wet and dry etching, wafer bonding and packaging.

AB - This chapter explains the techniques that are available for fabricating nanostructures and also explain the substrates and wafers, modification of materials, lithography, film deposition, wet and dry etching, wafer bonding and packaging.

UR - https://www.scopus.com/pages/publications/85126673349

U2 - 10.1007/978-3-030-26145-0_11

DO - 10.1007/978-3-030-26145-0_11

M3 - Chapter

AN - SCOPUS:85126673349

T3 - Engineering Materials

SP - 129

EP - 147

BT - Engineering Materials

PB - Springer Science and Business Media B.V.

ER -

Fabrication of Nanostructures

Abstract

Publication series

ASJC Scopus subject areas

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