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Experimental and numerical investigations into the transient multi-wafer batch atomic layer deposition process with vertical and horizontal wafer arrangements

  • Dongqing Pan
  • , Lulu Ma
  • , Yuanyuan Xie
  • , Fenfen Wang
  • , Tien Chien Jen
  • , Chris Yuan

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

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