Experimental and numerical investigations into the transient multi-wafer batch atomic layer deposition process with vertical and horizontal wafer arrangements

Dongqing Pan, Lulu Ma, Yuanyuan Xie, Fenfen Wang, Tien Chien Jen, Chris Yuan

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Experimental and numerical investigations into the transient multi-wafer batch atomic layer deposition process with vertical and horizontal wafer arrangements'. Together they form a unique fingerprint.

Material Science

Keyphrases

Chemical Engineering

Engineering