Keyphrases
Thin Film Coating
100%
Direct Current Magnetron Sputtering
100%
Target Power
100%
Physical Properties
22%
Mechanical Properties
22%
Glass Substrate
22%
Structural Properties
11%
High Power
11%
Structure-property Relationships
11%
Chemical Composition
11%
Microstructure
11%
Deposition Rate
11%
Mass Flow Rate
11%
Argon
11%
High Resistance
11%
Deposition Temperature
11%
Structure Size
11%
Plastic Deformation
11%
Maximum Power
11%
Substrate Deposition
11%
Deposition Parameters
11%
Roughness Value
11%
Deposition Pressure
11%
Flow Time
11%
Sputtering Process
11%
High Hardness
11%
Mechanical Analysis
11%
Sputtering Power
11%
Superplasticity
11%
Plasticity Index
11%
Soda-lime Glass
11%
Low Elastic Modulus
11%
Structure Roughness
11%
Direct Current Sputtering
11%
RMS Roughness
11%
Deformation Factor
11%
Composite Target
11%
Argon Flow Rate
11%
Physical-mechanical
11%
Resistance to Abrasive Wear
11%
Substrate Rotation
11%
Engineering
Thin Films
100%
Magnetron
100%
Direct Current
100%
Glass Substrate
18%
Mass Flowrate
9%
Flow Rate
9%
Structure Size
9%
Flow Time
9%
Temperature Time
9%
Deposition Temperature
9%
Deposition Parameter
9%
Abrasive Wear
9%
Plastic Deformation
9%
Plasticity Index
9%
Interlayer
9%
Structural Property
9%
Lime Glass
9%
Crystal Structure
9%
Flow Velocity
9%
Modulus of Elasticity
9%
Material Science
Magnetron Sputtering
100%
Thin Film Coating
100%
Thin Films
100%
Physical Property
11%
Structural Property
11%
Mechanical Testing
11%
Nucleation
11%
Elastic Moduli
11%
Plastic Deformation
11%
Composite Material
11%
Crystal Structure
11%