Abstract
In this work, aluminum thin films were sputtered on steel substrates at a varying substrate temperature ranging between 40 and 100 degrees Celsius. The films were characterized for microstructure by field emission scanning electron microscope, topography by atomic force microscope, mechanical properties by nanoindentation and the results related to the wear behavior of the films under very high sliding load of 30 N. The mechanism of failure of such films were observed and the relationship between the substrate temperature and sliding failure discussed. The study is important in understanding the failure mechanisms and improvement of the surface properties of sputtered aluminum thin films.
| Original language | English |
|---|---|
| Article number | 032093 |
| Journal | Journal of Physics: Conference Series |
| Volume | 1378 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 18 Dec 2019 |
| Event | 3rd International Conference on Engineering for Sustainable World, ICESW 2019 - Ota, Nigeria Duration: 3 Jul 2019 → 8 Jul 2019 |
Keywords
- Aluminum
- sputtering
- temperature
- thin films
- wear
ASJC Scopus subject areas
- General Physics and Astronomy