@inproceedings{42b9de6b3f8c4c188ef6bde58e6f5654,
title = "Evolution of microstructure and wear properties of aluminum thin films with sputtering substrate temperature",
abstract = "The influence of sputtering substrate temperature on the microstructure and wear properties of aluminum thin films deposited on stainless steel substrates by radio-frequency (RF) magnetron sputtering was studied. The aluminum films were deposited on stainless steel substrates at different temperatures of 70°C, 80°C and 100°C and at a constant power of 300 W. The surfaces of the films were then characterized by field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), surface profiling and wear methods. The wear was undertaken at extremely high sliding load of 50 N. Fine-grained and smooth microstructures exhibiting hillocks were observed at 70°C whereas coarse-grained and rough microstructures consisting of porous structures were obtained at 100°C. Defect-free and well-defined microstructures were obtained at 80°C. All the films obtained within this range of temperatures were crystalline according to the XRD results. Films obtained at 80°C were shown to have the highest coefficient of friction whereas those deposited at 100°C exhibited the lowest wear resistance. The films' failure along the edges of the balls under high sliding load were characterized by thinning, deformation and tearing (cracking).",
keywords = "Aluminum thin films, sputtering, substrate temperature, wear",
author = "Mwema, {Fredrick M.} and Akinlabi, {Esther T.} and Oladijo, {Oluseyi P.} and {Dutta Majumdar}, J.",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 10th IEEE International Conference on Mechanical and Intelligent Manufacturing Technologies, ICMIMT 2019 ; Conference date: 15-02-2019 Through 17-02-2019",
year = "2019",
month = may,
day = "9",
doi = "10.1109/ICMIMT.2019.8712046",
language = "English",
series = "2019 IEEE 10th International Conference on Mechanical and Intelligent Manufacturing Technologies, ICMIMT 2019",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "31--36",
booktitle = "2019 IEEE 10th International Conference on Mechanical and Intelligent Manufacturing Technologies, ICMIMT 2019",
address = "United States",
}