Evaluation of Process Parameters Influence on the Mechanical Properties of RF Magnetron Sputtered TiC Thin-Film Coating

Olayinka Oluwatosin Abegunde; Esther Titilayo Akinlabi; Oluseyi Philip Oladijo

doi:10.1007/978-981-15-4745-4_14

Evaluation of Process Parameters Influence on the Mechanical Properties of RF Magnetron Sputtered TiC Thin-Film Coating

Olayinka Oluwatosin Abegunde, Esther Titilayo Akinlabi, Oluseyi Philip Oladijo

Mechanical Engineering Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The mechanical properties of a thin-film coating are very paramount to the development and applications for both research and industrial usages. Enhanced mechanical properties give vast options of applications, curb cost and mitigate the unprecedented failure of materials in services. Optimizing the process parameter is very crucial in developing thin-film coatings mechanical properties. Taguchi was used to develop the experimental matrix using three levels and three factors. Three different sputtering parameters were varied during the experimental process from low to high level. Mechanical characterizations using nanoindentation, nanoscratch and wear tests were performed on the samples to determine the optimal process parameter that yields the best mechanical properties. From Taguchi analysis, the RF power proves to be the most effective control factor in optimizing the hardness and Young’s modulus properties with a contribution rate of 70.4% and 84.4%, respectively.

Original language	English
Title of host publication	Trends in Manufacturing and Engineering Management - Select Proceedings of ICMechD 2019
Editors	S. Vijayan, Nachiappan Subramanian, K. Sankaranarayanasamy
Publisher	Springer
Pages	145-155
Number of pages	11
ISBN (Print)	9789811547447
DOIs	https://doi.org/10.1007/978-981-15-4745-4_14
Publication status	Published - 2021
Event	2nd International Conference on Mechanical Engineering Design, ICMechD 2019 - Chennai, India Duration: 25 Apr 2019 → 26 Apr 2019

Publication series

Name	Lecture Notes in Mechanical Engineering
ISSN (Print)	2195-4356
ISSN (Electronic)	2195-4364

Conference

Conference	2nd International Conference on Mechanical Engineering Design, ICMechD 2019
Country/Territory	India
City	Chennai
Period	25/04/19 → 26/04/19

Keywords

ANOVA
RF magnetron sputtering
Taguchi

ASJC Scopus subject areas

Automotive Engineering
Aerospace Engineering
Mechanical Engineering
Fluid Flow and Transfer Processes

Access to Document

10.1007/978-981-15-4745-4_14

Cite this

Abegunde, O. O., Akinlabi, E. T., & Oladijo, O. P. (2021). Evaluation of Process Parameters Influence on the Mechanical Properties of RF Magnetron Sputtered TiC Thin-Film Coating. In S. Vijayan, N. Subramanian, & K. Sankaranarayanasamy (Eds.), Trends in Manufacturing and Engineering Management - Select Proceedings of ICMechD 2019 (pp. 145-155). (Lecture Notes in Mechanical Engineering). Springer. https://doi.org/10.1007/978-981-15-4745-4_14

Abegunde, Olayinka Oluwatosin ; Akinlabi, Esther Titilayo ; Oladijo, Oluseyi Philip. / Evaluation of Process Parameters Influence on the Mechanical Properties of RF Magnetron Sputtered TiC Thin-Film Coating. Trends in Manufacturing and Engineering Management - Select Proceedings of ICMechD 2019. editor / S. Vijayan ; Nachiappan Subramanian ; K. Sankaranarayanasamy. Springer, 2021. pp. 145-155 (Lecture Notes in Mechanical Engineering).

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abstract = "The mechanical properties of a thin-film coating are very paramount to the development and applications for both research and industrial usages. Enhanced mechanical properties give vast options of applications, curb cost and mitigate the unprecedented failure of materials in services. Optimizing the process parameter is very crucial in developing thin-film coatings mechanical properties. Taguchi was used to develop the experimental matrix using three levels and three factors. Three different sputtering parameters were varied during the experimental process from low to high level. Mechanical characterizations using nanoindentation, nanoscratch and wear tests were performed on the samples to determine the optimal process parameter that yields the best mechanical properties. From Taguchi analysis, the RF power proves to be the most effective control factor in optimizing the hardness and Young{\textquoteright}s modulus properties with a contribution rate of 70.4% and 84.4%, respectively.",

keywords = "ANOVA, RF magnetron sputtering, Taguchi",

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Abegunde, OO, Akinlabi, ET & Oladijo, OP 2021, Evaluation of Process Parameters Influence on the Mechanical Properties of RF Magnetron Sputtered TiC Thin-Film Coating. in S Vijayan, N Subramanian & K Sankaranarayanasamy (eds), Trends in Manufacturing and Engineering Management - Select Proceedings of ICMechD 2019. Lecture Notes in Mechanical Engineering, Springer, pp. 145-155, 2nd International Conference on Mechanical Engineering Design, ICMechD 2019, Chennai, India, 25/04/19. https://doi.org/10.1007/978-981-15-4745-4_14

Evaluation of Process Parameters Influence on the Mechanical Properties of RF Magnetron Sputtered TiC Thin-Film Coating. / Abegunde, Olayinka Oluwatosin; Akinlabi, Esther Titilayo; Oladijo, Oluseyi Philip.
Trends in Manufacturing and Engineering Management - Select Proceedings of ICMechD 2019. ed. / S. Vijayan; Nachiappan Subramanian; K. Sankaranarayanasamy. Springer, 2021. p. 145-155 (Lecture Notes in Mechanical Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Oladijo, Oluseyi Philip

PY - 2021

Y1 - 2021

N2 - The mechanical properties of a thin-film coating are very paramount to the development and applications for both research and industrial usages. Enhanced mechanical properties give vast options of applications, curb cost and mitigate the unprecedented failure of materials in services. Optimizing the process parameter is very crucial in developing thin-film coatings mechanical properties. Taguchi was used to develop the experimental matrix using three levels and three factors. Three different sputtering parameters were varied during the experimental process from low to high level. Mechanical characterizations using nanoindentation, nanoscratch and wear tests were performed on the samples to determine the optimal process parameter that yields the best mechanical properties. From Taguchi analysis, the RF power proves to be the most effective control factor in optimizing the hardness and Young’s modulus properties with a contribution rate of 70.4% and 84.4%, respectively.

AB - The mechanical properties of a thin-film coating are very paramount to the development and applications for both research and industrial usages. Enhanced mechanical properties give vast options of applications, curb cost and mitigate the unprecedented failure of materials in services. Optimizing the process parameter is very crucial in developing thin-film coatings mechanical properties. Taguchi was used to develop the experimental matrix using three levels and three factors. Three different sputtering parameters were varied during the experimental process from low to high level. Mechanical characterizations using nanoindentation, nanoscratch and wear tests were performed on the samples to determine the optimal process parameter that yields the best mechanical properties. From Taguchi analysis, the RF power proves to be the most effective control factor in optimizing the hardness and Young’s modulus properties with a contribution rate of 70.4% and 84.4%, respectively.

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Abegunde OO, Akinlabi ET, Oladijo OP. Evaluation of Process Parameters Influence on the Mechanical Properties of RF Magnetron Sputtered TiC Thin-Film Coating. In Vijayan S, Subramanian N, Sankaranarayanasamy K, editors, Trends in Manufacturing and Engineering Management - Select Proceedings of ICMechD 2019. Springer. 2021. p. 145-155. (Lecture Notes in Mechanical Engineering). doi: 10.1007/978-981-15-4745-4_14

Evaluation of Process Parameters Influence on the Mechanical Properties of RF Magnetron Sputtered TiC Thin-Film Coating

Abstract

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Keywords

ASJC Scopus subject areas

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