@inproceedings{fc88ad71f5a54632b216f6d84e7cf33d,
title = "Effect of afm scan size on the scaling law of sputtered aluminium thin films",
abstract = "The effect of scan size of the atomic force microscopy (AFM) imaging on the fractal characteristics of aluminium thin films deposited on stainless steel substrates by radiofrequency magnetron sputtering is presented. Three scan sizes of 3 × 3 μm, 5 × 5 μm and 10 × 10 μm were used to obtain the images on the AFM facility. Visual examination revealed that using very high scan size (10 × 10 μm) captured poorer images, although with more features. One-dimensional fractal dimensions were obtained as 1.610 ± 0.012, 1.606 ± 0.011 and 1.563 ± 0.014 for scan sizes of 3 × 3 μm, 5 × 5 μm and 10 × 10 μm, respectively. Multifractal analyses revealed that images obtained at lower scan sizes (3 × 3 μm and 5 × 5 μm) were mono-fractal, whereas those obtained at scan size of 10 × 10 μm were multifractal. The results suggest that the scan size can significantly influence the scaling results of the AFM measurements and therefore should be carefully chosen.",
keywords = "Aluminium, Atomic force microscopy (AFM), Scan size, Sputtering, Thin films",
author = "Mwema, {F. M.} and Akinlabi, {Esther T.} and Oladijo, {O. P.} and Akinlabi, {Stephen A.} and S. Hassan",
note = "Publisher Copyright: {\textcopyright} Springer Nature Singapore Pte Ltd 2020.; 5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019 ; Conference date: 19-11-2019 Through 21-11-2019",
year = "2020",
doi = "10.1007/978-981-15-5753-8_16",
language = "English",
isbn = "9789811557521",
series = "Lecture Notes in Mechanical Engineering",
publisher = "Springer Science and Business Media Deutschland GmbH",
pages = "171--176",
editor = "Emamian, {Seyed Sattar} and Farazila Yusof and Mokhtar Awang",
booktitle = "Advances in Manufacturing Engineering - Selected Articles from ICMMPE 2019",
address = "Germany",
}