Dependence of fractal characteristics on the scan size of atomic force microscopy (AFM) phase imaging of aluminum thin films

In this article, data demonstrating the effect of scan size on the fractal characteristics of phase images obtained via atomic force microscopy (AFM) are presented. The AFM phase imaging was conducted on thin aluminum films deposited on stainless steel substrates by radiofrequency (RF) magnetron sputtering at power of 150 W for 2 h and at room temperature. The AFM phase images were obtained at three different scan sizes (1 × 1 lm, 3 × 3 lm, 30 × 30 lm) at a constant scan rate and proportional-integral-deri vative (PID) control. The raw and analyzed data of the AFM visuals (micrographs) are presented in this article. The data on power spectral density functions (PDSF), fractal dimensions (D) and texture features obtained through image analyses at different scan sizes are also presented. The article also contains data (PSDF and fractal dimensions) comparing the fractal features obtained from the phase and height AFM micrographs at large scan size (30 × 30 lm). The data can be used in optimization of AFM measurement for industrial quality control.