Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

Olayinka Oluwatosin Abegunde; Esther Titilayo Akinlabi; Philip Oluseyi Oladijo

doi:10.1016/j.dib.2020.105205

Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

Olayinka Oluwatosin Abegunde, Esther Titilayo Akinlabi, Philip Oluseyi Oladijo

Mechanical Engineering Science

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating.

Original language	English
Article number	105205
Journal	Data in Brief
Volume	29
DOIs	https://doi.org/10.1016/j.dib.2020.105205
Publication status	Published - Apr 2020

Keywords

Atomic force microscope (AFM)
Field emission scanning electron microscope (FESEM)
Grazing incidence X-ray diffractometer (GIXRD)
Nanohardness
RF magnetron sputtering
Raman spectroscopy
TiC thin film

ASJC Scopus subject areas

Multidisciplinary

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10.1016/j.dib.2020.105205

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title = "Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering",

abstract = "The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating.",

keywords = "Atomic force microscope (AFM), Field emission scanning electron microscope (FESEM), Grazing incidence X-ray diffractometer (GIXRD), Nanohardness, RF magnetron sputtering, Raman spectroscopy, TiC thin film",

author = "Abegunde, {Olayinka Oluwatosin} and Akinlabi, {Esther Titilayo} and Oladijo, {Philip Oluseyi}",

note = "Publisher Copyright: {\textcopyright} 2020 The Authors",

year = "2020",

month = apr,

doi = "10.1016/j.dib.2020.105205",

language = "English",

volume = "29",

journal = "Data in Brief",

issn = "2352-3409",

publisher = "Elsevier BV",

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TY - JOUR

T1 - Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

AU - Abegunde, Olayinka Oluwatosin

AU - Akinlabi, Esther Titilayo

AU - Oladijo, Philip Oluseyi

PY - 2020/4

Y1 - 2020/4

N2 - The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating.

AB - The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating.

KW - Atomic force microscope (AFM)

KW - Field emission scanning electron microscope (FESEM)

KW - Grazing incidence X-ray diffractometer (GIXRD)

KW - Nanohardness

KW - RF magnetron sputtering

KW - Raman spectroscopy

KW - TiC thin film

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U2 - 10.1016/j.dib.2020.105205

DO - 10.1016/j.dib.2020.105205

M3 - Article

AN - SCOPUS:85078836210

SN - 2352-3409

VL - 29

JO - Data in Brief

JF - Data in Brief

M1 - 105205

ER -

Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

Abstract

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