Composition and Properties Control Growth of High-Quality GaOxNy Film by One-Step Plasma-Enhanced Atomic Layer Deposition
- Hong Ping Ma
- , Xiao Xi Li
- , Jia He Yang
- , Peihong Cheng
- , Wei Huang
- , Jingtao Zhu
- , Tien Chien Jen
- , Qixin Guo
- , Hong Liang Lu
- , David Wei Zhang
- Fudan University
- ShanghaiTech University
- Tongji University
- Saga University
Research output: Contribution to journal › Article › peer-review
26
Citations
(Scopus)