Cantilever for RF applications: Model and technology

Saurabh Chaturvedi, Mladen Bozanic, Dan Vasilache, Saurabh Sinha, Ioana Giangu, Alexandra Stefanescu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

A radio frequency (RF) microelectromechanical systems (MEMS) shunt cantilever is simulated using the Keysight Technologies Advanced Design System up to 65 GHz The electrical and RF performances of the fabricated switch are discussed. The RF simulation results are compared with the measurements for the up and down positions of the implemented MEMS switch.

Original languageEnglish
Title of host publication2017 40th International Semiconductor Conference, CAS 2017 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages271-274
Number of pages4
ISBN (Electronic)9781509039852
DOIs
Publication statusPublished - 7 Nov 2017
Externally publishedYes
Event40th International Semiconductor Conference, CAS 2017 - Sinaia, Romania
Duration: 11 Oct 201714 Oct 2017

Publication series

NameProceedings of the International Semiconductor Conference, CAS
Volume2017-October

Conference

Conference40th International Semiconductor Conference, CAS 2017
Country/TerritoryRomania
CitySinaia
Period11/10/1714/10/17

Keywords

  • RF MEMS
  • actuation
  • cantilever
  • coplanar waveguide (CPW)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

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