@inproceedings{0dee66f92d9a4ca0b9401d8857261fd6,
title = "Cantilever for RF applications: Model and technology",
abstract = "A radio frequency (RF) microelectromechanical systems (MEMS) shunt cantilever is simulated using the Keysight Technologies Advanced Design System up to 65 GHz The electrical and RF performances of the fabricated switch are discussed. The RF simulation results are compared with the measurements for the up and down positions of the implemented MEMS switch.",
keywords = "RF MEMS, actuation, cantilever, coplanar waveguide (CPW)",
author = "Saurabh Chaturvedi and Mladen Bozanic and Dan Vasilache and Saurabh Sinha and Ioana Giangu and Alexandra Stefanescu",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 40th International Semiconductor Conference, CAS 2017 ; Conference date: 11-10-2017 Through 14-10-2017",
year = "2017",
month = nov,
day = "7",
doi = "10.1109/SMICND.2017.8101222",
language = "English",
series = "Proceedings of the International Semiconductor Conference, CAS",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "271--274",
booktitle = "2017 40th International Semiconductor Conference, CAS 2017 - Proceedings",
address = "United States",
}