A Reynolds equation modelling Coriolis force effects on chemical mechanical polishing

E. Momoniat

doi:10.1016/j.ijnonlinmec.2017.04.003

A Reynolds equation modelling Coriolis force effects on chemical mechanical polishing

E. Momoniat

University of the Witwatersrand

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A Reynolds equation modelling chemical mechanical polishing in cylindrical polar coordinates is derived. Coriolis force effects are included in the derivation of the model equation. The main effect of the Coriolis force is to increase the magnitude of the peak pressure. A model for the peak pressure is given by max|p/p_atm|≈κ/ϵ where p is the pressure, p_atm is atmospheric pressure, κ=5×10⁻⁸ is a constant and ϵis a ratio of the thin film height to the height of the Ekman boundary layer. The value of ϵis obtained through numerical experimentation. Using the physical experimental parameters we show that for Newtonian fluids ϵ=O(10⁻⁵).

Original language	English
Pages (from-to)	111-117
Number of pages	7
Journal	International Journal of Non-Linear Mechanics
Volume	92
DOIs	https://doi.org/10.1016/j.ijnonlinmec.2017.04.003
Publication status	Published - 1 Jun 2017
Externally published	Yes

Keywords

Chemical mechanical polishing
Coriolis force
Ekman boundary layer
Reynolds equation

ASJC Scopus subject areas

Mechanics of Materials
Mechanical Engineering
Applied Mathematics

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10.1016/j.ijnonlinmec.2017.04.003

Cite this

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title = "A Reynolds equation modelling Coriolis force effects on chemical mechanical polishing",

abstract = "A Reynolds equation modelling chemical mechanical polishing in cylindrical polar coordinates is derived. Coriolis force effects are included in the derivation of the model equation. The main effect of the Coriolis force is to increase the magnitude of the peak pressure. A model for the peak pressure is given by max|p/patm|≈κ/ϵ where p is the pressure, patm is atmospheric pressure, κ=5×10−8 is a constant and ϵis a ratio of the thin film height to the height of the Ekman boundary layer. The value of ϵis obtained through numerical experimentation. Using the physical experimental parameters we show that for Newtonian fluids ϵ=O(10−5).",

keywords = "Chemical mechanical polishing, Coriolis force, Ekman boundary layer, Reynolds equation",

author = "E. Momoniat",

note = "Publisher Copyright: {\textcopyright} 2017 Elsevier Ltd",

year = "2017",

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doi = "10.1016/j.ijnonlinmec.2017.04.003",

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T1 - A Reynolds equation modelling Coriolis force effects on chemical mechanical polishing

AU - Momoniat, E.

PY - 2017/6/1

Y1 - 2017/6/1

N2 - A Reynolds equation modelling chemical mechanical polishing in cylindrical polar coordinates is derived. Coriolis force effects are included in the derivation of the model equation. The main effect of the Coriolis force is to increase the magnitude of the peak pressure. A model for the peak pressure is given by max|p/patm|≈κ/ϵ where p is the pressure, patm is atmospheric pressure, κ=5×10−8 is a constant and ϵis a ratio of the thin film height to the height of the Ekman boundary layer. The value of ϵis obtained through numerical experimentation. Using the physical experimental parameters we show that for Newtonian fluids ϵ=O(10−5).

AB - A Reynolds equation modelling chemical mechanical polishing in cylindrical polar coordinates is derived. Coriolis force effects are included in the derivation of the model equation. The main effect of the Coriolis force is to increase the magnitude of the peak pressure. A model for the peak pressure is given by max|p/patm|≈κ/ϵ where p is the pressure, patm is atmospheric pressure, κ=5×10−8 is a constant and ϵis a ratio of the thin film height to the height of the Ekman boundary layer. The value of ϵis obtained through numerical experimentation. Using the physical experimental parameters we show that for Newtonian fluids ϵ=O(10−5).

KW - Chemical mechanical polishing

KW - Coriolis force

KW - Ekman boundary layer

KW - Reynolds equation

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U2 - 10.1016/j.ijnonlinmec.2017.04.003

DO - 10.1016/j.ijnonlinmec.2017.04.003

M3 - Article

AN - SCOPUS:85017173005

SN - 0020-7462

VL - 92

SP - 111

EP - 117

JO - International Journal of Non-Linear Mechanics

JF - International Journal of Non-Linear Mechanics

ER -

A Reynolds equation modelling Coriolis force effects on chemical mechanical polishing

Abstract

Keywords

ASJC Scopus subject areas

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