A multifractal study of al thin films prepared by rf magnetron sputtering

F. M. Mwema, Esther T. Akinlabi, O. P. Oladijo, Stephen A. Akinlabi, S. Hassan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

In this article, a multi-fractal approach has been employed to study the micromorphology of sputtered aluminium films by radio frequency magnetron sputtering method. The films were prepared at 150 and 200 W on stainless and mild steel substrates of 50 mm by 50 mm by 3 mm dimensions. The substrates and targets were maintained at room temperature. The surface microstructures of the films were imaged using atomic force microscopy (AFM). The images were then subjected to the cube counting method to calculate the fractal dimension (D) and multifractal analysis to comprehend the complex nature of the sputtered Al films. The results show that the fractal dimension increases with power for mild steel substrates and decreases with RF power for stainless steel substrates. The multifractal behaviour determined through mass exponent as a function of moment order, singularity strength as a function of singularity exponent, and generalized fractal dimension as a function of moment order reveals that all the films are multifractal in nature.

Original languageEnglish
Title of host publicationAdvances in Manufacturing Engineering - Selected Articles from ICMMPE 2019
EditorsSeyed Sattar Emamian, Farazila Yusof, Mokhtar Awang
PublisherSpringer Science and Business Media Deutschland GmbH
Pages687-694
Number of pages8
ISBN (Print)9789811557521
DOIs
Publication statusPublished - 2020
Event5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019 - Kuala Lumpur, Malaysia
Duration: 19 Nov 201921 Nov 2019

Publication series

NameLecture Notes in Mechanical Engineering
ISSN (Print)2195-4356
ISSN (Electronic)2195-4364

Conference

Conference5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019
Country/TerritoryMalaysia
CityKuala Lumpur
Period19/11/1921/11/19

Keywords

  • Aluminium
  • Atomic force microscopy (AFM)
  • Microstructure
  • Multifractal theory
  • Radio-frequency sputtering
  • Sputtering power
  • Substrates
  • Thinfilms

ASJC Scopus subject areas

  • Automotive Engineering
  • Aerospace Engineering
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

Fingerprint

Dive into the research topics of 'A multifractal study of al thin films prepared by rf magnetron sputtering'. Together they form a unique fingerprint.

Cite this